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MEMSnet Home: MEMS-Talk: Problem of doing lift-off with PMMA and Aluminum Oxi de...
Problem of doing lift-off with PMMA and Aluminum Oxi de...
2004-11-17
Qingkai Yu
Problem of doing lift-off with PMMA and Aluminum Oxi de...
Qingkai Yu
2004-11-17
Jeff,

Could you tell me how you deposit alumina, by ebeam evaporation or
sputtering.

Qingkai
reply
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