Gene,

You may want to look at the GenTak/Gensolve family of adhesives/solvents
from General Chemical.  They do require a solvent for release, rather
than heat, but work well for wafer processing.  The following paper has
more specifics:
http://www.gaasmantech.org/digest/2004/2004Papers/8.10.pdf

good luck,
Chris Folk
Graduate student
UCLA MEMS
[email protected]


-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Wednesday, November 17, 2004 9:12 AM
To: General MEMS discussion
Subject: Re: [mems-talk] RE: thermal or optical releasable polymer

Dear Walter,

       Thank you very much for the info!  What I need is a glue or
polymer
can be spin-coated on a wafer, then bonded to a second wafer, after
processing on either of the wafer to separate them w/o any damage.  To
separate them, either using illumination by UV or IR or by heating. I
heard that there are some polymers can do this type of job, but do not
know the vendors.

Best regards!

Gene Gan
Skyworks Solutions, Inc.
5221 California Ave.
Irvine, CA 92612
Tel: (949) 231-3489