Hi Tong,
=20
I think you will find that the bubbles and cracking of your PZT is =
caused by poor adhesion of the TiPt bottom electrode, we have had this =
problem before and checked the quality of the TiPt using rocking curve =
XRD, we found we needed a minimum of 4 degerees half height full width =
angle of the rocking curve to ensure adhesion. To ensure that you get =
the best possible adhesion use sputtering for depositing the bottom =
electrode, have a long pre-sputter time on the Ti as it acts as a =
Getter, and without exposing the Ti to the atmosphere sputter the Pt. =
Hope this helps
=20
Glenn
=20
Glenn Leighton BSc Hons, MSc
PhD Student
Building 70
Cranfield University
Cranfield
Bedfordshire=20
MK43 0AL
Tel: 01234 750111 extn 2465
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