Hellow,
Anyone has comments or experience on microcracks of thick film ( 25 - 30
micron single coated  AZ resist film ) after develop. It is really hard to
find them before develop, or probably there no microcrack before develop.

After coating, followed by 180 - 240 sec. bakd at 110 C.  Exposures are
done on a contact aligner tool.  Maybe, this is a problem area, develop on
a batch station for 4-5 min.
What happen during this process and why?

Thank you for sharing your experience and informaion.


Jason Rim / AIO
e-mail : [email protected]