A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: 100nm metal patterning
100nm metal patterning
2004-11-28
Peter Ayliffe
100nm metal patterning
Peter Ayliffe
2004-11-28
Hello all,

I am looking for a supplier to pattern a single metal layer on top of
silica wafers.

The details are:

Substrate:                     Silica wafer
Metal:                           Chrome or aluminium
Metal thickness:            100nm
Feature size:                 100nm tracks, 100nm gaps

Does anyone know of a supplier with this capability?  I don't mind how
the metal is patterned.  So far I have made enquiries about dry etch and
ion-beam milling, but the small feature size is a problem for these
techniques.

Regards

Peter Ayliffe
Mesophotonics Limited
Chilworth Business Incubator
2 Venture Road
Chilworth Science Park
Southampton SO16 7NP

Tel:   +44 (0)23 8076 3752
Fax:  +44 (0)23 8076 3757

[email protected]


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
University Wafer
MEMS Technology Review
MEMStaff Inc.