A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: PECVD
PECVD
1998-12-21
Kevin M Walsh
PECVD
Kevin M Walsh
1998-12-21
Advice Please,

I have 100K available to purchase a PECVD System to deposite nitride and
perhaps oxide and poly  onto 2", 3" and 4" wafers.  I would appreciate
any recommendations, advice and comments.

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: [email protected]


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.