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MEMSnet Home: MEMS-Talk: RIE - keep Temp constant
RIE - keep Temp constant
2004-11-30
Karin Buchholz
2004-11-30
Brent Garber
2004-11-30
Shile
2004-11-30
Tripp, Marie Kathleen
2004-11-30
BobHendu@aol.com
2004-12-01
GRECO Florent
Can vaccum grease be used to bond PDMS to Silica
2004-12-01
Adrian Brozell
2004-12-02
Mohanraj Soundarapandian
RIE - keep Temp constant
BobHendu@aol.com
2004-11-30
Fomblin oil does work for us when we are using pieces. Just make sure you don't
use too much. A small drop is usually sufficient for making good thermal contact
to the carrier wafer. Now here is the secret to removing Fomblin completely. Use
Simple Green. It is the only thing I have found that will do the trick. Good
luck Bob Henderson

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