Doug,

 Put the baffle / buffer wafers in mesa etc (e.g. 75% HF, 22% HNO3, 3%
 acetic acid, highest concentrations of all of the above you can get).
 Also, for quartz baffles in a poly furnace generally, I've found that
 a few hours or an overnight soak in straight HF will work to clear
 very thick layers.

 -Eric Woods

> ---------- Forwarded message ----------
> From: "Doug Stewart" 
> To: 
> Date: Tue, 30 Nov 2004 12:57:02 -0500
> Subject: [mems-talk] method for bulk poly removal
> I am looking for a way to strip many, many microns of poly off of
> furnace baffle wafers.  Does anyone know a faster method than standard
> (wet) poly etch?
>
> Doug Stewart
>