Dear group,

Is anybody aware of:

1. etch process for 10-20 nm size features.
2. nanowire growth process in 10-20 nm features.

Sincerely,
Pari.

_______________________________________________________
Parijat Bhatnagar
Batt Research Group
Biomedical Engineering,
Cornell University, Ithaca, NY 14853
(607) 255 7902