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MEMSnet Home: MEMS-Talk: [q]e-beam evaporator power
[q]e-beam evaporator power
[q]e-beam evaporator power
2004-12-06
Sungjun Lee
[q]e-beam evaporator power
2004-12-07
Michael D Martin
[q]e-beam evaporator power
2004-12-07
Pierre Huet
[q]e-beam evaporator power
2004-12-08
Jeff Simkins
[q]e-beam evaporator power
Sungjun Lee
2004-12-06
Dear members,

I'm a graduate student of Physics.
I would like to know about the mechanism of power in the electron beam
evaporator.
We made a simple e-beam evaporator for metallization (Ti, Pt, and Pd) using 1mm
diameter metal rod in the lab.

As you may know well, the emission current determine the power in the
evaporator.
Strangely, I found the emission current of Ti is higher than that of Pd to get
the same evaporating rate,
even though the melting point of Ti is less than that of Pd .
In my experience in MEMS instruments, the emssion current of Ti is very lower
than that of Au.
Could you how to explain this fact?

As another question, I would like to know the behavior of metal rod (source).
In the Pt case, the droplet was formed on top of the rod in evaporating.
But Ti rod was bent after evaporating and Pd was formed the needle shape like
SPM tip.
Does anyone know about these things?

Thank you in advance.

Lee





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