Hi!
You can start from these papers:

D. T. Britton et al.
"Annealing and recrystallization of hydrogenated amorphous silicon"
PHYSICAL REVIEW B, VOLUME 64, 075403

S. Ferrero et al.
"Large area microcrystalline silicon films grown by ECR-CVD"
Thin Solid Films 00 (2000) 00-00

Paolo Tassini


> Does anyone know what XRD spectra of amorphous silicon film look like and
> where I can find the information?  Thank you in advance.
>
> Li
>