hello,

   I am going to use Su-8 photoresist. I have got the exposure
dose-thickness curve from microchem corp. According to what the
picture tells (see attachment), a 50um thick Su-8 photoresist will
only take 250mj/cm2, which is just 6 sec for a typical MJB4 mask
aligner with exposure power of about 40mw/cm2.

  I have not operated Su-8 before, but feel that this may have some
problem, since other photoresists such as AZ9260 requires a much
longer time.

  Can anyone who is experienced tell me the typical exposure time for
a 50um Su-8 film made from Su-8 2025 from Microchem? Thanks a lot.

  cheers

  Jiang