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MEMSnet Home: MEMS-Talk: etch Ni on GaAs Substrate?
etch Ni on GaAs Substrate?
2004-12-11
X.P. Zhu
etch Ni on GaAs Substrate?
X.P. Zhu
2004-12-11
Dear All,
  I use Ni film as mask to etch holes on GaAs by ICP.
Does anybody know which kind of etchant can remove Ni
after etching?
  Thanks a lot!

ZHU, X. P.

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