Hi, all:

Thanks for many information about ZnO sputtering which I posed last time.
And I have another question about selective etching.
Does anyone know how to etch Ti but not ZnO?
I know some literature etch Al but not ZnO, but it's hard to find information
etch Ti but not ZnO.
In my own experiment, I try Ti etchant(HF , RCA1, NaOH), but they also etch ZnO.
Is that Zn active than Ti?

Thanks any replay.
Jacob Yeh





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