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MEMSnet Home: MEMS-Talk: Lapped Wafers
Lapped Wafers
2004-12-14
[email protected]
Lapped Wafers
[email protected]
2004-12-14
I intend to fabricate passive devices with silicon as the substrate.
Lapped wafers are way cheaper than polished ones, and I was wondering if
that would work. Also, I will be growing layers of silicon nitride and
later silicon dioxide on silicon. Will the as-lapped wafers be detrimental
to the structure and registry of the grown layers ?

Thanks,
Vinit





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