hi doug,

thanks for the information. are you doing R&D or production? how's the
uniformity across the wafer and also the wafer to wafer uniformity? Primaxx
claims to have 5% non-uniform. just wonder if that's what you are seeing.

cheers,

Ning


-----Original Message-----
From: Doug Stewart [mailto:[email protected]]
Sent: Monday, December 13, 2004 10:17 AM
To: [email protected]
Subject: [mems-talk] RE: HF Vapor releasing


Hi Ning,
We use a tool from Primaxx for our HF vapor release process.  It works
well and the company is very helpful with respect to process and
maintenance help. Their website is:

www.primaxxinc.com

Good luck
Doug



Doug Stewart
Equipment Maintenance Supervisor
Infotonics Corporation
5450 Campus Drive
Canandaigua, NY 14424
(585) 919-3068
[email protected]


-----Original Message-----
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[mailto:[email protected]] On Behalf Of
[email protected]
Sent: Monday, December 13, 2004 12:02 PM
To: [email protected]
Subject: MEMS-talk Digest, Vol 26, Issue 13

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