A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Elevated temperature acetone bath for metallic liftoffprocess
Elevated temperature acetone bath for metallic liftoffprocess
2004-12-16
BobHendu@aol.com
Elevated temperature acetone bath for metallic liftoffprocess
BobHendu@aol.com
2004-12-16
Thomas:

I personally wouldn't recommed heated acetone due to the low flash point. If
your aluminum lines are lifting off I would suggest you check your deposition
system first. If you are depositing on silicon or silicon dioxide you might try
a sputter etch prior to deposition if you are sputtering or an oxygen ash
followed by a mild 10:1 HF dip for 20 seconds followed by an alcohol vapor dry
if you are evaporating. Bob Henderson

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Nano-Master, Inc.
The Branford Group
University Wafer