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MEMSnet Home: MEMS-Talk: Cleaning of Platinized Si wafer
Cleaning of Platinized Si wafer
2004-12-20
gjit@cat.ernet.in
2004-12-20
Kai Herbertz
Cleaning of Platinized Si wafer
gjit@cat.ernet.in
2004-12-20
I am starting work on deposition PZT thin film by sol-gel on platinized Si
substrate. can some body help me in giving some tips on cleaning of
Platinized Silicon substrate or any literature regarding same. My
substrate is Pt(111) on Si(001).

Gurvinder


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