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MEMSnet Home: MEMS-Talk: Any sources for tantal pentoxide?
Any sources for tantal pentoxide?
1998-03-18
Karl Kühl
Any sources for tantal pentoxide?
Karl Kühl
1998-03-18
Hi all,

we would like to use Ta2O5 as a  gate isolator  and I wonder if
anyone knows places that can deposit tantal pentoxide for a cost.  If
anyone has info for me, please help me out.

Thanks in advance.

Karl Kuehl

MEMS ServiceCenter at the IFT Muenchen  - Microfabrication Group


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