Hi,
We are looking at buying a sputtering machine, that can deposit both
Tantalum Pentoxide, and Multilayer metals.
We will probably buy one second-hand from one of the dealers, such as
Bid-Service.
I would like any suggestions as to brands to avoid / look out for,
particularly in regard to availability of spare parts.
I would also like to know how easy it is to get targets for these
machines, particularly for slightly exotic materials ( like Ta2O5 )
If you know of any good practical references that I should read,
please feel free to suggest these to me.
Many thanks,
--- Gary Turner
Industrial Research Ltd, Work: +64-4-569-0444 x 4220
P.O.Box 31310, Fax: +64-4-569-0754
Lower Hutt, (NZST : +1200) Home: +64-4-475-8844
New Zealand. Internet: [email protected]