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MEMSnet Home: MEMS-Talk: Want information on Sputterers
Want information on Sputterers
1998-03-23
Gary Turner
Want information on Sputterers
Gary Turner
1998-03-23
Hi,
We are looking at buying a sputtering machine, that can deposit both
Tantalum Pentoxide, and Multilayer metals.
We will probably buy one second-hand from one of the dealers, such as
Bid-Service.

I would like any suggestions as to brands to avoid / look out for,
particularly in regard to availability of spare parts.

I would also like to know how easy it is to get targets for these
machines, particularly for slightly exotic materials ( like Ta2O5 )

If you know of any good practical references that I should read,
please feel free to suggest these to me.

Many thanks,
--- Gary Turner

Industrial Research Ltd,      Work: +64-4-569-0444 x 4220
P.O.Box 31310,                 Fax: +64-4-569-0754
Lower Hutt,  (NZST : +1200)   Home: +64-4-475-8844
New Zealand.              Internet: g.turner@irl.cri.nz


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