A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Ni and Co depositon by Sputtering/Evopoartion process
Ni and Co depositon by Sputtering/Evopoartion process
2005-01-17
Pradeep Dixit
Ni and Co depositon by Sputtering/Evopoartion process
Pradeep Dixit
2005-01-17
Hi all,

Does any one has tried to deposit Ni or Cobalt through E-beam
evoporation/Sputtering process. I need to deposit 25 nm of Ni / Co on
my wafers.

Please let me know about the process parameters.

--
Thanks,
Pradeep Dixit
Research Student,
Micromachine Center,
NTU Singapore - 639669

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Addison Engineering
University Wafer
Tanner EDA by Mentor Graphics