A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Two metal layer process
Two metal layer process
2005-01-17
Li Wang
2005-01-18
shay kaplan
2005-01-18
David Nemeth
Re: Two metal layer process
2005-01-18
Li Wang
Two metal layer process
shay kaplan
2005-01-18
Li,
You are probably right about the Al native oxide. Try to sputter etch the
oxide before Cr deposition.
shay

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
The Branford Group
Harrick Plasma, Inc.
Addison Engineering