A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: su-8 ahesion
su-8 ahesion
2005-01-18
Xin Liu
2005-01-18
Bruno Wacogne
2005-01-18
Sonia Garcia Blanco
2005-01-18
Nicolas Duarte
su-8 ahesion
Nicolas Duarte
2005-01-18
I had a problem with SU-8 on glass slides that I thought was poor adhesion
but it turned out that I was just exposing it for too short a time.  Any
company that makes photoresist will be quoting the doses as they should be
on Si which has a reflective surface.  This causes the light to be
reflected back across the photoresist essentially doubling the dose that
you put in.  When working with glass you don't get this reflection of your
dose and you need to double the original dose you put in.

Bottom line, try exposing it for double the time that you expect.

Nicolas Duarte

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
MEMS Technology Review
Harrick Plasma, Inc.
Mentor Graphics Corporation