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MEMSnet Home: MEMS-Talk: RIE metal etching
RIE metal etching
2005-02-02
fabio quaranta
2005-02-02
Brent Garber
2005-02-02
Shile
2005-02-03
Kirt Williams
2005-02-02
[email protected]
RIE metal etching
Shile
2005-02-02
Niobium also etches in SF6 plasma.

Roger Shile
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