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MEMSnet Home: MEMS-Talk: quartz etching
quartz etching
2005-02-09
guillaume dubois
quartz etching
guillaume dubois
2005-02-09
Hello,

I am  a french student working on z-cut quartz etching.
I'd like to etch a 500µ (to have a 30µ structure) wafer but I can't
obtain a
good smoothness
(using 48% HF and 40% NH4F at 18°C).
Maybe somebody could help me!

thx

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