Has anyone ever heard of this term. We are using it to describe a
problem we are having along an exposed region of photoresist where the
resist "pops" off leaving a semi-circle in the remaining pattern edge.
We are using a 5 minute vapor prime but we have seen the same problem at
lesser times so I dont think we are overpriming the wafers. You can
immediatly tell after exposure if mousebites are there as they leave a
bubbly area in some areas of the wafer which is visible to the eye
before develop. This problem does not occur every time (15-20%). Any
suggestions would be greatly appreciated.

Please reply to [email protected]

Regards, Pat Howell