Hi Badin,

I can't give you the exact process parameters to do this, and you are
probably better off finding what works best for you anyway given how
dependent this is on mask geometries.  I can tell you however that we have
done this successfully, and one trick that should help is to put a metal
layer on the back side of the Pyrex.  This is especially helpful if you are
using an electrostatic wafer chuck, and will improve your control of the
wafer temperature as well.  Good luck.

Marc Straub, Sr. Engineering Design Manager
Solidus Technologies, Inc.
Colorado Springs, CO