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MEMSnet Home: MEMS-Talk: BPSG DEPOSITION
BPSG DEPOSITION
1998-04-10
lee ki seong
BPSG DEPOSITION
lee ki seong
1998-04-10
HELLO, COLLEAGUE

I hope that I can meet the place what I mentioned.

when I make bpsg film on bare wafer,I wonder the molecular structure

     of that film.

And I want to know length of each unit side about boron & phosphorus.

I will be glad to meet any information about that.

thank you.



                        LEE KI SEONG
                        (LG SEMICON)
                        TEL) 82-0431-270-3097
                        E-MAIL)
                        [email protected]


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