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MEMSnet Home: MEMS-Talk: XYZ-Theta stage in the vacuum?
XYZ-Theta stage in the vacuum?
2005-03-02
Bill Moffat
2005-03-02
Russell, James C
2005-03-02
Daniel Lloyd
XYZ-Theta stage in the vacuum?
Bill Moffat
2005-03-02
Andrew,
       I would use a vacuum feed through to deliver electrical power to
the inside of the chamber and then use XYZ drivers inside the chamber.
Bill Moffat

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