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MEMSnet Home: MEMS-Talk: Re: Thick PR
Re: Thick PR
1998-02-19
Eui-Hyeok(EH) YANG
Re: Thick PR
Eui-Hyeok(EH) YANG
1998-02-19
Myung-Kwon Koo wrote:
>
> I have tried to make 5um thick PR as sacrificial layer.
> But big shrinkage & roughness occured baking smaple in conventional
> oven for another layer deposition. So, we tried anthor baking method
> ,UV curing. we had good enough results of smoothness, which is not
> the best,I think. The better condition or perfect smoothness should
> be challenged.
>
> Dose anyone give me recommendation for better results ?
>

Why don't you use AZ or SJR?

E.H.Yang
IIS, The University of Tokyo
http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html


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