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MEMSnet Home: MEMS-Talk: Alternative to AZP4620 and AZ400K
Alternative to AZP4620 and AZ400K
2005-03-21
Pete Kirby
2005-03-21
Giancarlo Corti
native oxide of aluminum film
2005-03-22
li cai
2005-03-22
Isaac Wing Tak Chan
Alternative to AZP4620 and AZ400K
Isaac Wing Tak Chan
2005-03-22
Hi Pete,

Try to get AZ300MIF and develop at elevated temperature, say 60-70C. Don't
breath the odor. It is a highly diluted TMAH solution. At room temp., it
develops AZP4620 very slowly.

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo

> Does anyone have an alternative to this combination with similar
> performance? The staff here is complaining about the metal in the
> developer.

reply
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