Hi Joseph: Try MCNC.  I saw an anouncement of low stress SiNx from MCNC.
Wen


Hi folks,
>I wonder if anyone knows how to grow low stress silicon nitride
>for Xray mask membrane use?  Or if anyone knows places that can grow high
>quality low stress silicon nitride membrane for a cost?  Any info is
>appreciated and can help out all UW-Madison X-ray research groups greatly.
>
>Thanks
>Joseph Su
>