how to protect the sidewall of a trench which is
50micron in depth
#ZHOU QIAOER#
2005-03-30
you can try electrodeposited photoresist to protect the sidewall.
Reference:
Carsten Christensen, Peter Kersten, Sascha Henke and Siebe Bouwstra, "Wafer
Through-Hole Interconnections with High Vertical Wiring Densities", IEEE
Transactions on Components, Packaging, and Manufacturing Technology--Part A,
Vol. 19, No. 4, December 1996
hope it helps!
joyce
