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MEMSnet Home: MEMS-Talk: How to do the lift off process after aluminumdeposition? It is negative resist.
How to do the lift off process after aluminum deposition? It is negative resist.
2005-03-31
Duan
How to do the lift off process after aluminumdeposition? Itis negative resist.
2005-03-31
Jesse D Fowler
microstructured Pt thermal sensor
2005-04-01
Erik Jung
How to do the lift off process after aluminumdeposition? It is negative resist.
2005-03-31
Hongjun-ECE
2005-03-31
Duan
How to do the lift off process afteraluminumdeposition? Itis negative resist.
2005-03-31
Jesse D Fowler
How to do the lift off process afteraluminumdeposition? It is negative resist.
2005-03-31
Hongjun-ECE
How to do the lift off process afteraluminumdeposition? It is negative resist.
2005-03-31
Brent Garber
How to do the lift off process after aluminumdeposition? It is negative resist.
2005-03-31
Shile
How to do the lift off process after aluminumdeposition? It is negative resist.
Shile
2005-03-31
Use Photoresist stripper for liftoff

>I am trying to use the lift off process to pattern my aluminum film.
>What kind of solvent should I use?  It seems like that the aceton can
>not work well.  It is negative photo resist.

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