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MEMSnet Home: MEMS-Talk: Re: Any sources for Silicon Nitride?
Re: Any sources for Silicon Nitride?
1998-02-20
Wen H. Ko
1998-02-20
John Karpinsky
1998-02-20
Jay Mathews
1998-02-20
Jim Beall
1998-02-20
Reza Ghodssi
1998-02-20
Amit Lal
Re: Any sources for Silicon Nitride?
Amit Lal
1998-02-20
Joseph,

    I can get nitride for you from Berkeley.
    See me in class.

Amitr.

On Wed, 18 Feb 1998, Joseph Su wrote:

> Hi folks,
> I wonder if anyone knows how to grow low stress silicon nitride
> for Xray mask membrane use?  Or if anyone knows places that can grow high
> quality low stress silicon nitride membrane for a cost?  Any info is
> appreciated and can help out all UW-Madison X-ray research groups greatly.
>
> Thanks
> Joseph Su
>


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