Hi,
I am a graduate student in Electrical engg doing
research in MEMS. I would like to know which technique
of MEMS fabrication:Bulk micromachining, surface
micromachining or LIGA process is widely used in the
industry today to manufacture MEMS devices.

I would also like to know the current challenges
facing these fabrication methods.

Thanking you

Regards
Singaravelan Viswanathan