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MEMSnet Home: MEMS-Talk: ICP Polymer
ICP Polymer
2005-04-07
Lu Carol
2005-04-07
BobHendu@aol.com
ICP Polymer
BobHendu@aol.com
2005-04-07
Try oxygen with a 5% nitrogen gas in a plasma. That should clean it nicely.
Bob Henderson

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