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MEMSnet Home: MEMS-Talk: Breakthrough-voltage of SU-8 photoresist
Breakthrough-voltage of SU-8 photoresist
2005-04-09
Dominik Weiland
Breakthrough-voltage of SU-8 photoresist
Dominik Weiland
2005-04-09
Hello,

I wonder has anyone got experience with the breakthrough voltage of SU-8
thick film photo resist?

I have got nickel connection tracks buried in SU-8 and try to decide how far
these tracks are to be separated to prevent breakthrough when
applying a voltage difference of about 100V between them.

The only value I could find is E= 1.1e5 V/m which would be even worse than
air.

Thanks,
Dominik Weiland
[email protected]


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