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MEMSnet Home: MEMS-Talk: Ga deposition on MEMS structures
RE: Plasma Etching With Sloped Sidewalls
2005-04-06
Andrew Tucker
Ga deposition on MEMS structures
2005-04-11
Robert Dean
2005-04-12
David Nemeth
Ga deposition on MEMS structures
Robert Dean
2005-04-11
Hello,

I need to deposit a thin layer of Ga onto a Si MEMS device.  Does anyone
know if Ga can be E-beam deposited, since it melts around 27C?

Sincerely,

Robert Dean
Auburn University


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