RE: do photoresist and polyimide survive TMAH or KOH?
Dr. Mark W. Lund
1998-02-24
No, typical polymers used in semiconductor
processing do not survive alkali etchants.
best regards
mark
Mark W. Lund, PhD
Director >> Soft X-ray Web page http://www.moxtek.com<<
MOXTEK, Inc.
452 West 1260 North
Orem UT 84057 801-225-0930 FAX 801-221-1121
[email protected]
"The state is good at simple tasks, like killing people and seizing their
wealth. It has far more trouble reaching inside individuals and making them
good." Doug Bandow