Does anybody have experience with RF-sputtering of silicon on
(quartz)glass and/or metals (e.g. Al, Cu, Cr).
My biggest problem is adhesion of silicon on the above mentioned
substrates.
Does a web site exist that is especially dealing with RF-sputtering?
Thanks in advance,
Will. Bouts.
--
Oce Nederland B.V. name: will bouts
P.O. Box 101 email: [email protected]
5900 MA Venlo Tel: +31 (0)77-359 22 22
The Netherlands Fax: +31 (0)77-359 54 50
-------------------------g:\netscape\mailsig.txt--------
This note does not necessarily represent the position
of Oce-Technologies B.V. Therefore no liability or
responsibility for whatever will be accepted.
