You may consider:1. S. M. Sze's book on Semiconductor Sensors with
supplements on actuators and systems.

2. Short couses text from CWRU/MCNC, MIT and MIchigan U and Berkeley.

wen.

>Dear colleges,
>I am searching a book about MEMS technology.I want it to be a text book for
>beginners.
>Thanks for any help!
>
>sincerely
>Dasse
>[email protected]
>