A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: wet etching for crosslinked PS
wet etching for crosslinked PS
2005-04-21
[email protected]
2005-04-23
[email protected]
wet etching for crosslinked PS
[email protected]
2005-04-21
hi,anyone can give me suggestion how to remove crosslinked polystyrene
using wet etching or isotropic plasma etching? Is there any solvent which
can dissolve crosslinked PS?
I am using PS nanoporous template to build nanohouse:filling Au into
nanoporous and cover the surface as roof. The pore is 20nm in diameter and
spacing is 30nm and template thickness is 30nm. That is why it is
difficult to remove the crosslinked PS(the matrix) underneath the Au roof.
Thanks a lot!


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
University Wafer
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics