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MEMSnet Home: MEMS-Talk: Cracks on SU-8 during the development
Cracks on SU-8 during the development
2005-05-01
Amani Salim
Cracks on SU-8 during the development
Amani Salim
2005-05-01
Also if ur patterns have smooth edges, instead of sharp corners, that'll
reduce cracking too!

Amani

On 30 Apr 2005, Michael L wrote:

> Try to reduce your post-exposure baking time. This will leave more solvent
> in your SU8 during x-linking, enabling flow-induced stress relief and
> hopefully fewer cracks.
reply
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