Hello,

Does any one have a project report format for mems involving the force
deflection relation in mems cantilever beams.

Thanks

PATEL JITENDRA  wrote:

I am using a TaN thin film as a barrier to protect my wafer against
Copper diffusion. I was wondering if anyone has any information
regarding way to test my thin film. My annealing temperature is 350 C.
Please email me any papers, or any documents you have at
[email protected]. Thanks in advance for your help....