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MEMSnet Home: MEMS-Talk: Plasma etching MWCNTs
Plasma etching MWCNTs
2005-05-03
Patrick Roman
2005-05-04
[email protected]
Plasma etching MWCNTs
Patrick Roman
2005-05-03
Greetings MEMS-Talk colleagues-

I am looking for information regarding plasma etching of multi wall carbon
nanotubes (MWCNTs)  I have an amorphous carpet structure and I wish to trim
the top tubes off to achieve a more uniform layer.

Patrick Roman, M.S.
reply
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