A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Silicon nitride / silicon dioxide selective etching
Silicon nitride / silicon dioxide selective etching
2005-05-04
dijowie dijowie
Silicon nitride / silicon dioxide selective etching
dijowie dijowie
2005-05-04
hi all,

Does anyone know of any etch recipe(dry or wet) that can selectively etch
silicon nitride over SiO2?

Thank you.

David
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Addison Engineering
Mentor Graphics Corporation
The Branford Group