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MEMSnet Home: MEMS-Talk: 319 developer while protecting Al
319 developer while protecting Al
2005-05-05
Zhaoyang Fan
2005-05-05
[email protected]
2005-05-05
Robert Black
2005-05-05
Wilson, Thomas
319 developer while protecting Al
Zhaoyang Fan
2005-05-05
Hello,

We use Shipley 319 photoresist developer, while it attack the bottom Al
metal layer. Could you give me some advices how to overcome this problem?
Any other developers?

Thanks,

Zhaoyang

reply
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