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MEMSnet Home: MEMS-Talk: admissible stress of SiC,Si3N4
admissible stress of SiC,Si3N4
2005-05-10
Liu X.F.
admissible stress of SiC,Si3N4
Liu X.F.
2005-05-10
hi,
can anyone info me the admissible stress [permissible stress] of Si,3C-SiC or
Si3N4? i need it to calculate the measuring range of  a pressure sensor with a
diaphragm of thick=2micron,diameter=1millimetre.

thank you and best regards!

anodle
reply
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