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MEMSnet Home: MEMS-Talk: low-stress ZnO
low-stress ZnO
2005-05-10
Raegan Johnson
low-stress ZnO
Raegan Johnson
2005-05-10
Does anyone know how to obtain low stress ZnO?  we are using a RF magnetron
sputter system with a ZnO target.

also, does anyone know if there are groups/companies that will do a custom
deposition of low-stress ZnO?

thanks,
Raegan


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